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S
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(
M
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ly
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a
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in
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teria
l
a
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d
t
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ick
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ss
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so
r
with
5
a
n
d
2
0
m
m
th
ick
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e
ss
e
s.
K
ey
w
o
r
d
s
:
I
n
er
tial sen
s
o
r
Ma
ter
ial
MEMS
T
h
ick
n
ess
Vo
n
m
is
es st
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T
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s
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p
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c
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ss
a
rticle
u
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d
e
r th
e
CC B
Y
-
SA
li
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e
n
se
.
C
o
r
r
e
s
p
o
nd
ing
A
uth
o
r
:
Milad
in
a
R
izk
a
Aziz
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Dep
ar
tm
en
t o
f
E
lectr
ical
E
n
g
i
n
ee
r
in
g
,
U
n
iv
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s
itas
I
s
lam
Neg
er
i M
au
lan
a
Ma
lik
I
b
r
ah
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Ma
lan
g
6
5
1
4
4
,
Ma
lan
g
,
I
n
d
o
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esia
E
m
ail:
m
ilad
in
ar
izk
a@
u
in
-
m
a
lan
g
.
ac
.
id
1.
I
NT
RO
D
UCT
I
O
N
T
h
e
d
ev
elo
p
m
en
t
o
f
m
icr
o
-
ele
ctr
o
m
ec
h
an
ical
s
y
s
tem
(
ME
M
S)
tech
n
o
lo
g
y
h
as
in
tr
o
d
u
ce
d
n
u
m
er
o
u
s
n
ew
co
n
s
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m
er
a
n
d
in
d
u
s
tr
ial
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p
p
licatio
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s
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with
in
er
tial
m
ea
s
u
r
em
en
t
b
ein
g
o
n
e
o
f
its
m
o
s
t c
r
u
cial
ap
p
licatio
n
ar
ea
s
[1
]
,
[
2]
.
An
in
e
r
tial
s
en
s
o
r
s
er
v
es
as
d
ev
ice
th
at
ca
n
m
ea
s
u
r
e
in
er
tia,
wh
ich
g
en
e
r
ally
co
n
s
is
t
o
f
two
ty
p
es,
ac
ce
ler
o
m
eter
s
wh
ich
i
s
u
s
ed
to
d
etec
t
th
e
ex
ac
t
m
a
g
n
itu
d
e
o
f
d
ir
ec
tio
n
a
n
d
ac
ce
l
er
atio
n
(
o
r
g
-
f
o
r
ce
)
,
an
d
g
y
r
o
s
co
p
es
wh
ich
is
u
s
ed
to
m
ea
s
u
r
e
an
g
u
lar
s
p
ee
d
[
3
]
.
B
asically
,
ac
ce
ler
o
m
eter
an
d
g
y
r
o
s
co
p
e
ca
n
b
e
m
o
d
eled
as
a
s
y
s
tem
co
n
s
is
ted
o
f
a
p
r
o
o
f
m
ass
,
s
p
r
in
g
an
d
d
am
p
er
[
4
]
.
C
ap
ac
itiv
e
ac
ce
ler
o
m
eter
with
p
er
f
o
r
ate
d
p
r
o
o
f
m
ass
s
tr
u
ctu
r
e
h
as
b
ee
n
wid
el
y
u
s
ed
b
ec
au
s
e
it
r
ed
u
ce
s
air
atten
u
atio
n
an
d
s
ig
n
i
f
ican
tly
im
p
r
o
v
es
s
en
s
o
r
p
er
f
o
r
m
an
ce
[5
]
-
[
7]
.
Vib
r
atio
n
s
o
f
m
ec
h
a
n
ical
elem
en
ts
wh
ich
is
also
f
o
r
m
ed
in
p
r
o
o
f
m
ass
ar
e
u
tili
ze
d
b
y
g
y
r
o
s
co
p
es to
d
etec
t r
o
tatio
n
.
M
E
M
S
g
y
r
o
s
c
o
p
e
s
a
r
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c
l
a
s
s
i
f
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e
d
i
n
t
o
s
e
v
e
r
a
l
s
t
r
u
c
t
u
r
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s
,
s
u
c
h
a
s
g
i
m
b
a
l
g
y
r
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c
o
p
e
s
,
t
u
n
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n
g
f
o
r
k
g
y
r
o
s
c
o
p
e
s
,
v
i
b
r
a
t
i
n
g
r
i
n
g
g
y
r
o
s
c
o
p
e
s
,
a
n
d
s
o
l
i
d
-
s
t
a
t
e
g
y
r
o
s
c
o
p
e
s
[
8
]
.
A
m
o
n
g
t
h
e
s
e
,
t
u
n
i
n
g
f
o
r
k
g
y
r
o
s
c
o
p
e
s
a
r
e
m
o
s
t
l
y
f
a
v
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r
e
d
d
u
e
t
o
t
h
e
i
r
s
u
p
e
r
i
o
r
p
e
r
f
o
r
m
a
n
c
e
,
w
h
i
c
h
i
s
a
t
t
r
i
b
u
t
e
d
t
o
t
h
e
i
r
p
l
a
n
a
r
s
t
r
u
c
t
u
r
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f
a
c
i
l
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t
a
t
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n
g
l
a
r
g
e
-
s
c
a
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m
a
n
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f
a
c
t
u
r
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,
e
f
f
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c
t
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v
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c
o
m
m
o
n
-
m
o
d
e
r
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j
e
c
t
i
o
n
,
a
n
d
l
o
w
p
o
w
e
r
c
o
n
s
u
m
p
t
i
o
n
[9
]
-
[
11]
.
H
o
w
e
v
e
r
,
a
c
h
i
e
v
i
n
g
h
i
g
h
s
e
n
s
i
t
i
v
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t
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i
n
t
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g
f
o
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k
g
y
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o
s
c
o
p
e
s
r
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m
a
i
n
s
a
s
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g
n
i
f
i
c
a
n
t
c
h
a
l
l
e
n
g
e
f
o
r
o
p
t
i
m
a
l
p
e
r
f
o
r
m
a
n
c
e
[
1
2
]
,
[
1
3
]
.
I
n
er
tial
s
en
s
o
r
s
h
av
e
b
ee
n
wid
ely
em
p
l
o
y
ed
t
o
d
eliv
e
r
p
r
e
cise
p
o
s
itio
n
an
d
m
o
tio
n
m
e
asu
r
em
en
t
s
o
lu
tio
n
ac
r
o
s
s
n
u
m
er
o
u
s
k
ey
s
ec
to
r
s
,
s
u
ch
as
ae
r
o
s
p
ac
e,
r
o
b
o
tics
,
h
ea
lth
ca
r
e
,
p
o
wer
elec
tr
o
n
ics,
n
eu
r
o
tech
n
o
lo
g
ies
an
d
p
o
r
tab
le
d
ev
ices
[
1
4
]
-
[
1
9
]
.
T
h
e
d
iv
er
s
ity
o
f
th
ese
ap
p
licatio
n
s
r
esu
lts
in
d
if
f
er
en
t
r
eq
u
ir
em
e
n
ts
o
n
in
er
tial
s
en
s
o
r
s
r
eg
ar
d
in
g
ac
cu
r
ac
y
,
s
ize,
p
o
wer
co
n
s
u
m
p
tio
n
,
a
n
d
co
s
t
[
2
0
]
.
W
ith
th
e
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
Op
timiz
in
g
s
tr
e
s
s
r
e
s
is
ta
n
ce
i
n
MEMS
in
erti
a
l sen
s
o
r
s
th
r
o
u
g
h
m
a
teri
a
l a
n
d
…
(
Mil
a
d
in
a
R
iz
ka
A
z
iz
a
)
111
in
cr
ea
s
in
g
d
em
an
d
in
ME
MS
tech
n
o
lo
g
y
,
it
is
cr
u
cial
to
c
o
n
s
id
er
v
ar
io
u
s
f
ac
to
r
s
af
f
ec
t
in
g
ME
MS
d
ev
ice
p
er
f
o
r
m
an
ce
,
s
u
c
h
as su
r
f
ac
e
t
en
s
io
n
,
v
is
co
s
ity
,
s
q
u
ee
ze
f
ilm
d
am
p
in
g
,
an
d
r
esid
u
al
s
tr
ess
[
2
1
]
.
Stre
s
s
o
n
m
icr
o
-
elec
tr
o
m
ec
h
a
n
ical
s
y
s
tem
s
(
ME
MS)
s
en
s
o
r
s
ca
n
lead
to
r
ed
u
ce
d
s
en
s
o
r
ac
cu
r
ac
y
[
2
1
]
,
[
22]
.
ME
MS
s
en
s
o
r
s
m
ig
h
t
u
n
d
er
g
o
a
s
h
if
t
in
th
e
o
u
tp
u
t
s
ig
n
al
(
o
f
f
s
et)
d
u
e
t
o
th
er
m
o
m
ec
h
an
ical
s
tr
ess
e
s
ca
u
s
ed
b
y
th
e
p
ac
k
a
g
in
g
ass
em
b
ly
p
r
o
ce
s
s
an
d
e
x
ter
n
al
lo
ad
s
ap
p
lied
d
u
r
in
g
o
p
er
atio
n
[
2
3
]
,
[
24]
.
Mo
d
elin
g
an
d
s
im
u
latio
n
to
m
in
im
i
ze
s
tr
ess
-
in
d
u
ce
s
o
f
f
s
et
d
r
if
t
is
cr
itical
to
ac
h
iev
in
g
h
ig
h
p
r
ec
is
io
n
in
ac
ce
ler
o
m
eter
s
,
g
y
r
o
s
co
p
es,
a
n
d
o
t
h
er
ME
MS
d
e
v
ices
[
2
5
]
.
Alth
o
u
g
h
th
er
m
o
m
ec
h
a
n
ical
s
tr
ess
is
k
n
o
wn
as
th
e
s
o
u
r
ce
o
f
er
r
o
r
in
ME
M
S
d
ev
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th
e
r
o
le
o
f
m
ater
i
al
an
d
th
ick
n
ess
v
ar
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n
s
in
en
h
an
cin
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ME
MS
d
ev
ice
p
er
f
o
r
m
an
ce
s
is
n
o
t
f
u
lly
ex
p
lo
r
ed
.
T
h
is
r
esear
ch
aim
s
to
ad
d
r
ess
th
e
ch
allen
g
es
b
y
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o
cu
s
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th
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s
tr
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b
eh
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in
g
f
o
r
k
g
y
r
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s
co
p
es
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er
tial
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en
s
o
r
s
.
Sp
ec
if
ically
,
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s
im
u
late
s
an
d
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aly
ze
s
h
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w
m
ater
ial
p
r
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p
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ties
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d
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en
s
o
r
d
im
e
n
s
io
n
s
af
f
ec
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s
tr
ess
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is
tr
ib
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tio
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,
with
th
e
g
o
al
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m
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tr
ess
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in
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ce
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er
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o
r
s
.
B
y
o
p
tim
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g
th
e
d
esig
n
,
p
a
r
ticu
lar
ly
with
t
h
e
in
clu
s
io
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o
f
a
p
er
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ate
d
p
r
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o
f
m
ass
to
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c
e
d
am
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in
g
,
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tu
d
y
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n
t
r
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u
t
es
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h
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n
cin
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th
e
p
r
ec
is
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n
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d
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eliab
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f
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MS
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en
s
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r
s
u
s
ed
ac
r
o
s
s
v
ar
io
u
s
in
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u
s
tr
ies.
2.
M
E
T
H
O
D
2
.
1
.
Dev
ice
des
ig
n
Fig
u
r
e
1
illu
s
tr
ates
th
e
p
r
o
ce
s
s
o
f
d
ev
el
o
p
in
g
in
er
tial
s
en
s
o
r
.
T
h
e
p
r
im
ar
y
co
m
p
o
n
en
t
o
f
t
h
e
in
er
tial
s
en
s
o
r
co
n
s
is
ts
o
f
th
r
ee
p
ar
ts
:
th
e
p
r
o
o
f
m
ass
,
th
e
h
o
le,
a
n
d
th
e
ar
m
,
as
s
h
o
wn
in
Fig
u
r
e
1
(
a
)
.
T
ab
le
1
d
em
o
n
s
tr
ates
th
e
s
tr
u
ctu
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al
d
i
m
en
s
io
n
s
o
f
th
e
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tial
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en
s
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r
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h
e
to
tal
d
im
en
s
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o
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th
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5
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len
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9
0
m
m
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d
1
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m
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t.
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h
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esig
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s
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esh
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h
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d
esig
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teg
o
r
ized
in
to
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g
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p
s
:
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o
u
p
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,
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o
u
p
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o
p
,
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o
u
p
Go
th
e
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s
,
an
d
Gr
o
u
p
_
all
,
as
s
h
o
wn
in
Fig
u
r
e
1
(
b
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.
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p
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s
h
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y
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p
,
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e
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r
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o
f
th
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s
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s
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r
wh
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ess
will
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e
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x
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ted
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n
wh
ile,
th
e
Gr
o
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p
Go
th
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,
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h
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wn
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p
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e
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th
a
n
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o
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p
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d
Gr
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u
p
GT
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p
.
On
ce
th
e
m
esh
was c
r
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ted
,
al
l p
ar
ts
ar
e
g
r
o
u
p
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d
.
T
ab
le
1
.
Stru
ctu
r
al
d
im
en
s
io
n
s
o
f
in
er
tial sen
s
o
r
S
e
n
s
o
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st
r
u
c
t
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r
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Le
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g
t
h
×
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i
d
t
h
×
H
e
i
g
h
t
(
mm
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B
o
x
(
P
r
o
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f
M
a
ss)
H
o
l
e
b
o
x
Arm
1
5
0
×
1
5
0
×
10
6
×
6
×
10
1
4
5
×
20
×
10
Fig
u
r
e
1
.
T
h
e
d
esig
n
o
f
in
e
r
tial sen
s
o
r
:
(
a)
in
er
tial sen
s
o
r
s
tr
u
ctu
r
e
an
d
(
b
)
th
e
m
esh
c
r
ea
tio
n
u
s
in
g
s
alo
m
e
2
.
2
.
Sim
ula
t
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o
n m
et
ho
d
E
lm
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o
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ical
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h
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s
o
f
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er
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en
t
t
o
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Fig
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2
p
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ig
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ates
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ct
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d
b
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ess
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d
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h
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ater
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s
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h
e
p
ar
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s
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a
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n
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n
d
ar
y
c
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n
d
itio
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n
ee
d
to
b
e
s
et.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
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N
:
2
5
0
2
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4
7
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2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
,
Vo
l.
39
,
No
.
1
,
J
u
ly
20
25
:
1
10
-
1
17
112
(
a)
(
b
)
(
c)
(
d
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(
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Fig
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r
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2
.
T
h
e
d
esig
n
o
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s
en
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m
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g
g
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t
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c
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lete
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tr
u
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d
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r
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d
(
e
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(
f
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u
n
d
ar
y
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o
u
p
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2
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Li
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LU
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r
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y
st
e
m
R
e
s
i
d
u
a
l
O
u
t
p
u
t
=
1
Li
n
e
a
r
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y
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m Pr
e
c
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n
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i
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i
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R
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c
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m
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u
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=
1
En
d
T
ab
le
3
.
Ma
ter
ial
p
a
r
am
eter
M
a
t
e
r
i
a
l
P
a
r
a
me
t
e
r
V
a
l
u
e
S
i
l
i
c
o
n
D
e
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si
t
y
Y
o
u
n
g
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m
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l
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s
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r
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3
3
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/
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m
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p
a
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7
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.
2834
×
10
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8
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3
G
e
r
man
i
u
m
D
e
n
si
t
y
Y
o
u
n
g
s
m
o
d
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l
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s
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o
i
ss
o
n
r
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t
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G
a
l
i
u
m A
r
se
n
i
d
e
D
e
n
si
t
y
Y
o
u
n
g
s
m
o
d
u
l
u
s
P
o
i
ss
o
n
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t
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e
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o
d
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.
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a
0
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3
1
5
.
2136
×
10
−
8
/
3
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
Op
timiz
in
g
s
tr
e
s
s
r
e
s
is
ta
n
ce
i
n
MEMS
in
erti
a
l sen
s
o
r
s
th
r
o
u
g
h
m
a
teri
a
l a
n
d
…
(
Mil
a
d
in
a
R
iz
ka
A
z
iz
a
)
113
T
h
e
v
alu
e
o
f
s
tr
ess
b
o
d
y
f
o
r
ce
was
in
(
1
)
.
Str
e
s
s
B
ody
F
or
c
e
=
G
r
a
vity
F
or
c
e
x
De
n
s
ity
(
1)
T
h
u
s
,
th
e
b
o
d
y
f
o
r
ce
ap
p
lied
t
o
th
e
o
b
ject
is
ex
p
r
ess
ed
in
th
e
(
2
)
:
=
9
.
8
/
2
2330
/
3
(
2)
=
22834
/
2
2
B
ec
au
s
e
th
e
s
tr
ess
in
p
u
t
was
in
f
lu
en
ce
d
b
y
g
r
av
itatio
n
al
f
o
r
ce
s
,
th
e
v
alu
e
o
f
v
o
lu
m
e
f
o
r
ce
s
was
ap
p
lied
to
th
e
z
-
ax
is
.
T
h
e
n
e
g
ativ
e
s
ig
n
in
d
icate
s
th
e
o
p
p
o
s
ite
d
ir
ec
tio
n
.
T
h
e
p
r
ess
u
r
e
was
s
et
to
0
wh
ich
in
d
icate
s
n
o
is
o
tr
o
p
ic
p
r
ess
u
r
e
o
n
th
e
b
o
d
y
s
en
s
o
r
.
3.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
N
Vo
n
Mises
s
tr
ess
is
th
e
s
tr
es
s
lev
el
th
at
lead
s
to
m
ater
ial
f
ailu
r
e
wh
e
n
th
e
m
ater
ial
e
x
p
er
ien
ce
s
tr
iax
ial
s
tr
ess
wh
ich
p
r
o
d
u
ce
s
s
tr
ain
en
er
g
y
.
Failu
r
e
o
cc
u
r
s
wh
en
th
e
s
tr
ain
en
er
g
y
f
r
o
m
t
h
e
tr
iax
ial
s
tr
ess
is
eq
u
al
to
th
e
s
tr
ain
en
er
g
y
o
b
s
er
v
ed
in
a
s
tan
d
a
r
d
ten
s
ile
test
o
f
th
e
m
ater
ial
’
s
y
ield
p
o
in
t.
B
asically
,
s
tr
ess
i
s
d
ef
in
ed
as th
e
f
o
r
ce
e
x
er
ted
p
e
r
u
n
it a
r
ea
,
as sh
o
wn
in
(
3
)
.
σ
=
C
2
ℎ
2
(
3)
σ
: stre
s
s
C
:
co
n
s
tan
t
P:
p
r
ess
u
r
e
l:
s
tr
u
ctu
r
e
len
g
th
h
:
s
tr
u
ctu
r
e
th
ick
n
ess
T
h
e
l
i
n
e
a
r
e
l
as
t
i
ci
t
y
e
q
u
at
i
o
n
c
a
n
b
e
u
s
e
d
t
o
d
e
t
e
r
m
i
n
e
t
h
e
s
t
r
es
s
g
e
n
e
r
a
t
e
d
w
i
t
h
i
n
a
n
o
b
je
c
t
.
E
l
m
e
r
s
o
f
t
w
a
r
e
p
r
o
v
i
d
e
s
a
g
r
a
p
h
i
c
u
s
e
r
i
n
t
e
r
f
a
c
e
(
GUI
)
t
h
a
t
al
l
o
ws
u
s
e
r
s
t
o
v
i
e
w
d
es
i
r
e
d
r
e
s
p
o
n
s
e
s
a
n
d
c
a
p
a
b
l
e
o
f
d
e
m
o
n
s
t
r
a
t
i
n
g
t
h
e
s
o
l
u
t
i
o
n
o
f
l
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n
e
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r
e
l
a
s
t
i
c
it
y
e
q
u
a
t
i
o
n
o
n
a
3
D
o
b
j
e
c
t
.
I
n
t
h
i
s
c
as
e
,
t
h
e
3
D
o
b
j
e
c
t
i
s
a
n
i
n
e
r
ti
al
s
e
n
s
o
r
c
o
m
m
o
n
l
y
u
s
e
d
i
n
M
E
M
S
s
e
n
s
o
r
s
.
M
a
t
h
e
m
at
i
c
a
ll
y
,
th
e
s
t
r
es
s
e
q
u
a
ti
o
n
c
a
n
b
e
d
e
s
c
r
ib
e
d
i
n
(
4
)
a
n
d
(
5
)
.
=
−
(
−
)
(
4)
τ
(
u
)
=
(
∇
.
)
+
(
∇
.
+
(
∇
.
)
)
(
5)
wh
er
e
ε
is
th
e
s
tr
ain
an
d
C
is
th
e
elastic
m
o
d
u
lu
s
.
T
h
e
p
ar
a
m
eter
s
to
b
e
co
n
s
id
er
e
d
in
th
e
m
ater
ial
s
elec
tio
n
ar
e
d
en
s
ity
,
Yo
u
n
g
’
s
m
o
d
u
lu
s
,
an
d
Po
is
s
o
n
R
atio
.
λ
=
Y
κ
(
1
+
κ
)
(
1
−
2
)
(
6)
=
Y
2
(
1
+
)
(
7)
wh
er
e
Y
is
Yo
u
n
g
’
s
m
o
d
u
l
u
s
,
κ
is
Po
is
s
o
n
’
s
r
atio
,
λ
an
d
µ
ar
e
m
ater
ial
f
o
r
m
i
n
g
p
a
r
am
eter
s
.
B
ased
o
n
th
e
(
6
)
a
n
d
(
7
)
,
it is
ev
id
en
t th
at
th
e
s
tr
ess
lev
el
ca
n
b
e
af
f
ec
te
d
b
y
b
o
th
th
e
ty
p
e
o
f
m
ater
ial
an
d
th
e
th
ick
n
ess
o
f
d
if
f
er
en
t
s
tr
u
ctu
r
es.
T
h
er
ef
o
r
e,
th
is
p
ap
er
will
d
is
cu
s
s
h
o
w
th
e
m
ater
i
al
an
d
th
ick
n
ess
o
f
th
e
in
er
tial sen
s
o
r
im
p
ac
t th
e
r
esu
ltin
g
s
tr
ess
.
Acc
o
r
d
in
g
to
s
im
u
latio
n
r
es
u
lts
u
s
in
g
E
lm
er
s
o
f
twar
e,
th
e
m
ax
im
u
m
s
tr
ess
v
alu
e
(
in
r
ed
)
was
9
.
3
5
×
10
-
4
MPa,
th
e
o
p
tim
al
s
tr
ess
v
alu
e
(
in
g
r
ee
n
)
was
4
.
6
8
×
10
-
4
MPa,
an
d
th
e
m
in
im
u
m
s
tr
ess
was
(
in
b
lu
e)
7
.
4
7
×
10
-
7
MPa,
as
s
h
o
wn
i
n
T
ab
le
4
.
Simu
latio
n
r
esu
lts
d
em
o
n
s
tr
ate
in
Fig
u
r
e
3
th
at
t
h
e
s
tr
ess
p
ar
t
was
o
n
th
e
ar
m
.
On
ce
a
f
o
r
ce
is
ap
p
li
ed
to
th
e
s
en
s
o
r
,
d
is
p
lace
m
en
t
o
cc
u
r
s
an
d
s
tr
ess
ap
p
ea
r
s
in
th
e
s
en
s
o
r
.
Sin
ce
th
e
p
o
r
tio
n
o
f
th
e
s
en
s
o
r
th
at
r
e
m
ain
s
s
tatio
n
ar
y
is
in
th
e
s
en
s
o
r
ar
m
,
s
tr
ess
also
ap
p
ea
r
s
i
n
th
e
s
en
s
o
r
ar
m
,
as
s
h
o
wn
in
Fig
u
r
e
3
(
a
)
.
T
h
is
o
cc
u
r
s
b
ec
au
s
e
th
e
s
en
s
o
r
a
r
m
s
ex
p
er
ien
ce
d
ten
s
io
n
to
p
r
ev
en
t
m
o
v
em
e
n
t.
Mo
r
eo
v
er
,
th
e
s
tr
ess
was
co
n
ce
n
tr
ated
at
th
e
en
d
s
o
f
th
e
s
en
s
o
r
ar
m
d
u
e
to
th
e
f
ac
t
th
at
th
e
s
m
aller
th
e
cr
o
s
s
-
s
ec
tio
n
al
ar
ea
,
th
e
g
r
ea
ter
th
e
s
tr
ess
ex
p
er
ien
ce
d
.
Fig
u
r
e
3
(
b
)
illu
s
tr
ates
th
e
co
n
v
er
g
e
n
ce
g
r
ap
h
o
f
s
im
u
latio
n
r
esu
lts
,
it c
an
b
e
s
ee
n
th
at
to
r
ea
ch
th
e
lin
ea
r
s
tate
it tak
es u
p
to
th
e
6
th
iter
atio
n
.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4
7
5
2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
,
Vo
l.
39
,
No
.
1
,
J
u
ly
20
25
:
1
10
-
1
17
114
(
a)
(
b
)
Fig
u
r
e
3
.
Vo
n
Mises
s
tr
ess
s
i
m
u
latio
n
o
f
:
(
a)
in
e
r
tial sen
s
o
r
at
1
0
m
m
th
ick
n
ess
an
d
(
b
)
c
o
n
v
er
g
en
ce
h
is
to
r
y
o
f
s
ilico
n
in
er
tial sen
s
o
r
3
.
1
.
M
a
t
er
ia
l
m
o
difica
t
io
n si
m
ula
t
io
n
I
n
in
er
tial
s
en
s
o
r
s
,
th
e
m
ater
ial
u
s
ed
is
th
e
k
ey
f
ac
to
r
th
at
af
f
ec
ts
s
tr
ess
.
T
h
er
ef
o
r
e,
we
tr
ied
to
s
im
u
late
th
e
in
er
tial
s
en
s
o
r
u
s
in
g
d
if
f
e
r
en
t
m
ater
ials
,
as
s
h
o
wn
in
Fig
u
r
e
4
.
T
h
e
v
o
n
Mises
s
tr
ess
s
im
u
latio
n
r
esu
lts
f
o
r
d
if
f
er
e
n
t
m
ater
ials
u
s
ed
in
th
e
s
en
s
o
r
s
tr
u
ct
u
r
e
h
ig
h
lig
h
t
th
e
s
p
ec
if
ic
m
ater
ia
l
s
tr
ess
d
i
s
tr
ib
u
tio
n
th
at
is
co
n
ce
n
tr
ated
i
n
th
e
s
en
s
o
r
ar
m
s
,
as
illu
s
tr
ated
in
Fig
u
r
e
s
4
(
a
)
-
(
c
)
,
r
esp
ec
tiv
ely
,
f
o
r
s
ilico
n
,
g
e
r
m
an
iu
m
,
an
d
g
alliu
m
ar
s
en
id
e.
T
a
b
le
4
an
d
Fig
u
r
e
4
(
d
)
d
em
o
n
s
tr
ates
th
e
s
im
u
latio
n
r
esu
lts
o
f
m
a
ter
ial
m
o
d
if
icatio
n
.
T
h
e
m
in
im
u
m
s
tr
ess
o
f
s
ilico
n
,
g
er
m
an
iu
m
,
an
d
g
aliu
m
ar
s
en
id
e
wer
e
7
.
4
7
×
10
-
7
,
2
.
4
1
×
10
-
6
,
an
d
2
.
5
0
×
10
-
6
,
MPa,
r
esp
ec
tiv
ely
.
Me
an
wh
i
le,
th
e
m
a
x
im
u
m
s
tr
ess
o
f
s
ilico
n
,
g
er
m
an
i
u
m
,
a
n
d
g
aliu
m
ar
s
en
i
d
e
wer
e
9
.
3
5
×
10
-
4
,
2
.
2
3
×
10
-
3
,
an
d
2
.
0
2
×
10
-
3
MPa,
r
esp
ec
tiv
ely
.
T
h
e
h
ig
h
er
m
ater
ial
d
en
s
ity
lea
d
s
to
g
r
ea
ter
s
tr
ess
,
r
esu
ltin
g
in
an
in
cr
e
ase
in
v
o
n
Mises
s
tr
es
s
.
T
h
u
s
,
th
e
s
tr
ess
p
r
o
d
u
ce
d
b
y
g
er
m
an
iu
m
was
g
r
ea
ter
th
an
g
alliu
m
ar
s
en
id
e
an
d
s
ilico
n
,
wh
ich
was in
ac
co
r
d
a
n
ce
with
(
6
)
an
d
(
7
)
.
(a
)
(
b
)
(
c)
(
d
)
Fig
u
r
e
4
.
Vo
n
Mises
s
tr
ess
s
i
m
u
latio
n
o
f
:
(
a)
s
ilico
n
,
(
b
)
g
e
r
m
an
iu
m
,
(
c)
g
aliu
m
ar
s
en
id
e,
an
d
(
d
)
g
r
ap
h
o
f
v
o
n
Mises
s
tr
ess
with
d
if
f
er
en
t m
ate
r
ials
T
ab
le
4
.
Simu
latio
n
r
esu
lts
o
f
i
n
er
tial
s
en
s
o
r
with
m
ater
ial
m
o
d
if
icatio
n
M
a
t
e
r
i
a
l
M
i
n
i
m
u
m
st
r
e
ss
B
l
u
e
(
M
P
a
)
O
p
t
i
mu
m
st
r
e
ss
G
r
e
e
n
(
M
P
a
)
M
a
x
i
m
u
m
st
r
e
ss
R
e
d
(
M
P
a
)
S
i
l
i
c
o
n
G
e
r
man
i
u
m
G
a
l
i
u
m A
r
se
n
i
d
e
7
.
4
7
×
10
-
7
2
.
4
1
×
10
-
6
2
.
5
0
×
10
-
6
4
.
6
8
×
10
-
4
1
.
1
2
×
10
-
3
1
.
0
1
×
10
-
3
9
.
3
5
×
10
-
4
2
.
2
3
×
10
-
3
2
.
0
2
×
10
-
3
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
I
SS
N:
2502
-
4
7
5
2
Op
timiz
in
g
s
tr
e
s
s
r
e
s
is
ta
n
ce
i
n
MEMS
in
erti
a
l sen
s
o
r
s
th
r
o
u
g
h
m
a
teri
a
l a
n
d
…
(
Mil
a
d
in
a
R
iz
ka
A
z
iz
a
)
115
3
.
2
.
T
hick
nes
s
m
o
difica
t
io
n
s
im
ula
t
io
n
B
esid
es
th
e
m
ater
ial
u
s
ed
,
th
e
len
g
t
h
an
d
t
h
ick
n
ess
o
f
t
h
e
s
tr
u
ctu
r
e
ca
n
also
im
p
ac
t
th
e
s
tr
ess
p
r
o
d
u
ce
d
b
y
th
e
in
er
tial
s
en
s
o
r
.
I
n
th
is
r
esear
ch
,
we
ad
j
u
s
ted
th
e
th
ic
k
n
ess
o
f
t
h
e
s
en
s
o
r
wh
ile
k
ee
p
in
g
th
e
o
th
er
d
im
en
s
io
n
s
co
n
s
tan
t.
Fig
u
r
e
5
p
r
esen
ts
th
e
v
o
n
Mises
s
tr
es
s
s
im
u
latio
n
s
u
s
in
g
v
ar
io
u
s
th
ick
n
ess
es,
h
ig
h
lig
h
tin
g
th
e
ef
f
ec
t
o
f
th
i
ck
n
ess
o
n
s
tr
ess
d
is
tr
ib
u
tio
n
.
Fig
u
r
e
5
(
a
)
-
(
e
)
illu
s
tr
ates
th
e
v
o
n
Mises
s
tr
ess
d
is
tr
ib
u
tio
n
with
d
if
f
er
e
n
t
th
i
ck
n
ess
es
o
f
5
,
7
,
1
0
,
1
5
,
a
n
d
2
0
m
m
,
r
esp
ec
tiv
ely
.
As
t
h
e
s
en
s
o
r
’
s
th
ick
n
ess
in
cr
ea
s
es,
th
e
m
in
im
u
m
s
tr
ess
v
alu
e
(
s
h
o
wn
in
b
lu
e
)
d
ec
r
ea
s
es,
wh
ich
alig
n
s
with
th
e
f
o
r
m
u
la
in
(
3
)
.
Fo
r
th
e
o
p
tim
al
(
s
h
o
wn
in
g
r
ee
n
)
an
d
m
ax
im
u
m
(
s
h
o
wn
in
r
ed
)
s
tr
ess
,
at
th
ick
n
ess
es
o
f
1
0
,
1
5
,
an
d
2
0
m
m
,
g
r
ea
ter
th
ick
n
ess
r
esu
lts
in
h
ig
h
er
s
tr
ess
v
alu
es.
Ho
wev
er
,
at
5
a
n
d
7
m
m
th
ick
n
ess
es,
th
e
o
p
ti
m
al
an
d
m
ax
im
u
m
s
tr
ess
v
alu
es d
ev
iate
f
r
o
m
th
e
f
o
r
m
u
la.
T
h
e
m
in
im
u
m
s
tr
ess
o
f
th
ick
n
ess
v
ar
iatio
n
wer
e
2
.
3
1
×
10
-
6
,
9
.
4
4
×
10
-
7
,
7
.
4
7
×
10
-
7
,
7
.
2
0
×
10
-
7
,
6
.
5
2
×
10
-
7
MPa,
r
esp
ec
tiv
ely
,
f
o
r
5
,
7
,
1
0
,
1
5
an
d
2
0
m
m
.
Me
an
wh
ile,
th
e
m
a
x
im
u
m
s
tr
ess
o
f
th
ick
n
ess
v
ar
iatio
n
wer
e
6
.
1
2
×
10
-
4
,
8
.
8
7
×
10
-
4
,
9
.
3
5
×
10
-
4
,
8
.
1
1
×
10
-
4
,
5
.
2
6
×
10
-
4
MPa,
r
esp
ec
tiv
ely
,
f
o
r
5
,
7
,
1
0
,
1
5
,
a
n
d
2
0
m
m
.
T
h
e
s
im
u
latio
n
r
esu
l
ts
in
d
icate
th
at
at
5
an
d
7
m
m
,
th
e
d
is
tr
ib
u
tio
n
o
f
m
a
x
im
u
m
s
tr
ess
v
alu
es
i
s
b
r
o
ad
e
r
th
a
n
at
1
0
,
1
5
,
a
n
d
2
0
m
m
,
as
s
h
o
w
n
in
T
ab
le
5
a
n
d
Fig
u
r
e
5
(
f
)
.
T
h
is
d
em
o
n
s
tr
ates
th
at
a
th
i
n
n
er
s
en
s
o
r
lead
s
to
a
wid
er
d
is
tr
ib
u
tio
n
o
f
m
ax
im
u
m
s
tr
ess
,
wh
ich
ca
n
im
p
ac
t t
h
e
s
en
s
o
r
’
s
p
er
f
o
r
m
an
ce
.
(
a)
(
b
)
(
c)
(
d
)
(
e)
(f)
Fig
u
r
e
5
.
Vo
n
Mises
s
tr
ess
s
i
m
u
latio
n
at
:
(
a)
5
m
m
,
(
b
)
7
m
m
,
(
c)
1
0
mm
,
(
d
)
1
5
,
(
e)
2
0
mm
th
ick
n
ess
es,
an
d
(
f)
g
r
a
p
h
o
f
v
o
n
Mises
s
tr
ess
with
d
if
f
er
en
t th
ic
k
n
ess
es
T
ab
le
5
.
Simu
latio
n
r
esu
lts
o
f
in
er
tial
s
en
s
o
r
with
th
ick
n
ess
m
o
d
if
icatio
n
Th
i
c
k
n
e
ss
M
i
n
i
m
u
m
st
r
e
ss
B
l
u
e
(
M
P
a
)
O
p
t
i
mu
m
st
r
e
ss
G
r
e
e
n
(
M
P
a
)
M
a
x
i
m
u
m
st
r
e
ss
R
e
d
(
M
P
a
)
5
mm
7
mm
1
0
mm
1
5
mm
2
0
mm
2
.
3
1
×
10
-
6
9
.
4
4
×
10
-
7
7
.
4
7
×
10
-
7
7
.
2
0
×
10
-
7
6
.
5
2
×
10
-
7
3
.
0
7
×
10
-
4
4
.
4
4
×
10
-
4
4
.
6
8
×
10
-
4
4
.
0
6
×
10
-
4
2
.
6
5
×
10
-
4
6
.
1
2
×
10
-
4
8
.
8
7
×
10
-
4
9
.
3
5
×
10
-
4
8
.
1
1
×
10
-
4
5
.
2
6
×
10
-
4
4.
CO
NCLU
SI
O
N
Stre
s
s
em
er
g
es
as
a
cr
u
cial
p
ar
am
eter
to
b
e
c
o
n
s
id
er
ed
in
M
E
MS
s
en
s
o
r
s
to
m
ain
tain
th
eir
ac
cu
r
ac
y
an
d
p
er
f
o
r
m
a
n
ce
.
Ou
r
f
in
d
i
n
g
s
p
r
o
v
id
e
co
n
clu
s
iv
e
e
v
id
en
ce
th
at
th
is
p
h
en
o
m
en
o
n
is
ass
o
ciate
d
with
th
e
m
ater
ial
co
m
p
o
s
itio
n
an
d
th
e
th
ick
n
ess
o
f
th
e
s
en
s
o
r
,
wh
i
ch
in
cf
lu
e
n
ce
th
e
lev
el
o
f
s
tr
ess
ex
er
ted
.
R
ec
en
t
o
b
s
er
v
atio
n
s
s
u
g
g
est
th
at
th
e
h
ig
h
er
m
ater
ial
d
en
s
ity
c
o
r
r
el
ates
with
h
eig
h
ten
ed
s
tr
ess
lev
el,
th
u
s
Ger
m
an
i
u
m
h
as
th
e
h
ig
h
est
s
tr
ess
lev
el
co
m
p
ated
to
Sil
ico
n
a
n
d
Galiu
m
Ar
s
en
id
e.
Fu
r
th
er
m
o
r
e,
th
ick
er
s
en
s
o
r
d
im
en
s
io
n
s
lead
t
o
a
r
ed
u
ctio
n
in
s
tr
ess
lev
el
.
I
n
er
tial
s
en
s
o
r
with
th
e
th
ick
n
ess
o
f
5
an
d
7
m
m
h
av
e
b
r
o
ad
er
d
is
tr
ib
u
tio
n
o
f
s
tr
ess
v
alu
es th
an
at
1
0
,
1
5
,
an
d
2
0
m
m
th
ick
n
ess
es.
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
5
0
2
-
4
7
5
2
I
n
d
o
n
esian
J
E
lec
E
n
g
&
C
o
m
p
Sci
,
Vo
l.
39
,
No
.
1
,
J
u
ly
20
25
:
1
10
-
1
17
116
ACK
NO
WL
E
DG
E
M
E
NT
S
T
h
is
wo
r
k
was
s
u
p
p
o
r
ted
b
y
Un
iv
er
s
itas
I
s
lam
N
eg
er
i
Ma
u
lan
a
Ma
lik
I
b
r
ah
im
M
alan
g
an
d
B
r
awijay
a
Un
iv
er
s
ity
.
F
UNDING
I
NF
O
R
M
A
T
I
O
N
Au
th
o
r
s
s
tate
n
o
f
u
n
d
in
g
in
v
o
lv
ed
.
AUTHO
R
CO
NT
RI
B
UT
I
O
NS ST
A
T
E
M
E
N
T
Na
m
e
o
f
Aut
ho
r
C
M
So
Va
Fo
I
R
D
O
E
Vi
Su
P
Fu
Milad
in
a
R
izk
a
Aziz
a
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
✓
On
n
y
Sety
awa
ti
✓
✓
✓
✓
✓
✓
✓
✓
J
u
m
iad
i
✓
✓
✓
✓
✓
✓
C
:
C
o
n
c
e
p
t
u
a
l
i
z
a
t
i
o
n
M
:
M
e
t
h
o
d
o
l
o
g
y
So
:
So
f
t
w
a
r
e
Va
:
Va
l
i
d
a
t
i
o
n
Fo
:
Fo
r
mal
a
n
a
l
y
s
i
s
I
:
I
n
v
e
s
t
i
g
a
t
i
o
n
R
:
R
e
so
u
r
c
e
s
D
:
D
a
t
a
C
u
r
a
t
i
o
n
O
:
W
r
i
t
i
n
g
-
O
r
i
g
i
n
a
l
D
r
a
f
t
E
:
W
r
i
t
i
n
g
-
R
e
v
i
e
w
&
E
d
i
t
i
n
g
Vi
:
Vi
su
a
l
i
z
a
t
i
o
n
Su
:
Su
p
e
r
v
i
s
i
o
n
P
:
P
r
o
j
e
c
t
a
d
mi
n
i
st
r
a
t
i
o
n
Fu
:
Fu
n
d
i
n
g
a
c
q
u
i
si
t
i
o
n
CO
NF
L
I
C
T
O
F
I
N
T
E
R
E
S
T
ST
A
T
E
M
E
NT
Au
th
o
r
s
s
tate
n
o
co
n
f
lict o
f
in
t
er
est.
DATA AV
AI
L
AB
I
L
I
T
Y
Data
av
ailab
ilit
y
is
n
o
t
ap
p
li
ca
b
le
to
th
is
p
ap
er
as
n
o
n
e
w
d
ata
wer
e
cr
ea
ted
o
r
an
aly
ze
d
in
th
is
s
tu
d
y
.
RE
F
E
R
E
NC
E
S
[
1
]
D
.
K
.
S
h
a
e
f
f
e
r
,
“
M
E
M
S
i
n
e
r
t
i
a
l
se
n
so
r
s:
a
t
u
t
o
r
i
a
l
o
v
e
r
v
i
e
w
,
”
I
EEE
C
o
m
m
u
n
i
c
a
t
i
o
n
s
M
a
g
a
zi
n
e
,
v
o
l
.
5
1
,
n
o
.
4
,
p
p
.
1
0
0
-
1
0
9
,
2
0
1
3
,
d
o
i
:
1
0
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1
1
0
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/
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c
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tac
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m
a
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:
ju
m
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n
m
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r.
a
c
.
id
.
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