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n
in
g
ty
p
e
io
n
s
o
u
r
ce
(
S
ila
kh
u
d
d
in
)
2563
i
n
t
e
n
s
it
y
[
1
7
]
.
T
h
e
p
e
n
n
i
n
g
t
y
p
e
i
o
n
s
o
u
r
c
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i
n
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y
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o
t
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o
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a
t
a
m
a
x
i
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m
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at
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l
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o
f
u
p
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i
m
a
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l
y
3
k
V
a
n
d
a
c
a
t
h
o
d
e
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u
r
r
e
n
t
o
f
a
b
o
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t
1
A
,
s
o
t
h
e
p
o
w
e
r
u
s
e
d
is
a
b
o
u
t
3
k
W
.
T
h
e
f
lo
w
r
ate
o
f
th
e
g
as
in
ject
ed
in
to
th
e
io
n
s
o
u
r
ce
will
af
f
e
ct
th
e
g
as
p
r
ess
u
r
e
v
alu
e
in
th
e
io
n
izatio
n
ch
am
b
er
,
f
u
r
th
e
r
af
f
ec
tin
g
th
e
d
en
s
ity
o
f
g
as
ato
m
s
/m
o
lecu
les
in
th
e
ch
am
b
er
,
an
d
u
ltim
ately
af
f
ec
tin
g
th
e
io
n
izatio
n
d
e
n
s
ity
.
I
o
n
izatio
n
d
en
s
ity
is
also
af
f
ec
ted
b
y
elec
tr
o
n
en
er
g
y
a
n
d
io
n
izin
g
elec
tr
o
n
cu
r
r
en
t.
E
l
e
c
t
r
o
n
e
n
e
r
g
y
d
e
p
e
n
d
s
o
n
t
h
e
c
a
t
h
o
d
e
v
o
l
t
a
g
e
v
a
l
u
e
,
a
n
d
e
l
e
c
t
r
o
n
c
u
r
r
e
n
t
d
e
p
e
n
d
s
o
n
t
h
e
c
a
t
h
o
d
e
c
u
r
r
e
n
t
.
T
h
e
m
u
l
t
i
p
l
i
c
a
t
i
o
n
o
f
th
e
ca
th
o
d
e
cu
r
r
en
t
b
y
th
e
c
ath
o
d
e
v
o
ltag
e
is
wh
at
is
m
ea
n
t
by
io
n
izin
g
p
o
wer
in
t
h
is
r
esear
ch
r
ep
o
r
t.
Sev
er
al
ex
p
e
r
im
en
ts
h
a
v
e
b
ee
n
co
n
d
u
cted
o
n
th
e
ef
f
ec
t
o
f
g
as
f
lo
w
r
ate
o
n
io
n
izatio
n
ch
a
r
ac
ter
is
tics
.
Fo
r
ex
am
p
le,
L
o
n
g
et
a
l.
[
1
8
]
o
b
s
er
v
e
d
th
e
e
f
f
ec
t
o
f
ch
a
n
g
i
n
g
th
e
g
as
f
lo
w
r
ate
o
n
th
e
li
g
h
t
in
ten
s
ity
in
th
e
io
n
izatio
n
ch
a
m
b
er
at
a
ca
th
o
d
e
cu
r
r
e
n
t
o
f
1
.
3
4
A.
Ya
n
g
et
a
l.
[
1
9
]
o
b
s
er
v
ed
th
e
ef
f
ec
t
o
f
ch
an
g
in
g
th
e
g
as
f
lo
w
r
ate
v
alu
e
o
n
th
e
ca
th
o
d
e
v
o
ltag
e
at
a
s
p
ec
if
ic
ca
th
o
d
e
cu
r
r
en
t
o
f
1
.
2
9
A.
C
alv
o
et
a
l.
[
4
]
o
b
s
er
v
ed
th
e
ef
f
ec
t
o
f
ch
a
n
g
es
in
ca
th
o
d
e
c
u
r
r
en
t
o
n
ca
th
o
d
e
v
o
ltag
e
f
o
r
v
ar
io
u
s
g
as
r
ate
v
alu
es
an
d
o
b
s
er
v
ed
th
e
ef
f
ec
t
o
f
ch
an
g
es
in
g
as
r
ate
o
n
ca
th
o
d
e
v
o
ltag
e
f
o
r
v
ar
io
u
s
ca
th
o
d
e
c
u
r
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en
t
v
alu
es
o
f
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e
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al
h
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n
d
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ed
m
A.
Of
th
e
s
ev
er
al
ex
p
er
im
en
ts
th
at
h
a
v
e
b
ee
n
m
en
tio
n
ed
,
wh
at
h
as
n
o
t
b
e
en
d
o
n
e
is
th
e
ef
f
ec
t
o
f
g
as
f
lo
w
r
ate
o
n
th
e
ch
ar
ac
ter
is
tics
o
f
io
n
izin
g
p
o
wer
an
d
it
s
ef
f
ec
t o
n
th
e
io
n
iz
atio
n
r
ate.
A
l
t
h
o
u
g
h
s
e
v
e
r
a
l
e
x
p
e
r
i
m
e
n
ts
h
a
v
e
i
n
v
e
s
t
i
g
a
t
e
d
t
h
e
c
o
r
r
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l
at
i
o
n
b
e
t
w
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e
n
g
a
s
f
l
o
w
a
n
d
o
p
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r
a
t
i
o
n
a
l
q
u
a
n
t
i
t
i
es
i
n
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n
n
i
n
g
i
o
n
s
o
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r
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e
s
,
t
h
e
r
e
is
a
l
a
c
k
o
f
r
e
s
ea
r
c
h
a
d
d
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e
s
s
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n
g
t
h
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o
r
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l
at
i
o
n
b
e
t
w
ee
n
g
a
s
f
l
o
w
r
a
t
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a
n
d
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o
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z
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n
g
p
o
w
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r
.
A
n
o
t
h
e
r
l
ac
k
o
f
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e
a
r
c
h
t
h
a
t
a
d
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e
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e
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t
h
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o
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o
f
g
a
s
f
l
o
w
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at
e
o
n
i
o
n
i
z
a
ti
o
n
i
n
t
e
n
s
it
y
r
a
t
e
i
n
i
o
n
s
o
u
r
c
e
p
l
a
s
m
as
.
T
h
e
r
e
a
r
e
s
t
i
ll
t
w
o
p
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o
b
l
e
m
s
t
h
a
t
r
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m
a
i
n
u
n
a
n
s
w
e
r
e
d
.
T
h
e
f
i
r
s
t
p
r
o
b
l
e
m
i
s
h
o
w
t
h
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g
a
s
f
l
o
w
r
a
t
e
a
f
f
e
c
t
s
t
h
e
i
o
n
i
zi
n
g
p
o
w
e
r
,
a
n
d
t
h
e
s
e
c
o
n
d
p
r
o
b
l
e
m
is
t
h
e
r
o
le
o
f
t
h
e
g
a
s
f
l
o
w
r
a
t
e
o
n
t
h
e
i
o
n
iz
a
t
i
o
n
i
n
t
e
n
s
i
t
y
.
T
h
e
a
i
m
o
f
t
h
i
s
e
x
p
e
r
i
m
e
n
t
a
l
s
t
u
d
y
i
s
t
o
a
d
d
r
es
s
tw
o
g
a
p
s
i
n
p
r
i
o
r
r
e
s
e
a
r
c
h
a
n
d
p
r
o
v
i
d
e
s
o
l
u
ti
o
n
s
to
t
h
e
s
e
p
r
o
b
l
e
m
s
.
T
h
is
p
ap
er
p
r
esen
ts
ex
p
er
im
e
n
tal
r
esu
lts
an
d
an
an
aly
s
is
o
f
th
e
ef
f
ec
t o
f
g
as f
lo
w
r
ate
o
n
th
e
io
n
izin
g
p
o
wer
c
h
ar
ac
ter
is
tics
.
T
h
ese
f
in
d
in
g
s
ar
e
n
o
v
el,
as
n
o
p
r
ev
io
u
s
w
o
r
k
h
as
ex
p
lo
r
ed
th
is
s
p
ec
if
ic
ar
ea
.
Ad
d
itio
n
ally
,
we
will
in
v
esti
g
a
te
th
e
io
n
izatio
n
d
en
s
ity
r
ate,
o
r
io
n
izatio
n
p
r
o
d
u
ctiv
ity
,
o
f
th
e
io
n
s
o
u
r
ce
,
wh
i
ch
will
f
u
r
th
er
c
o
n
tr
ib
u
te
to
th
e
o
r
ig
in
ality
o
f
th
is
s
tu
d
y
.
T
h
is
r
e
s
ea
r
ch
is
im
p
o
r
tan
t
t
o
d
o
b
ec
a
u
s
e
b
y
r
ec
o
g
n
izin
g
th
e
ch
ar
ac
ter
is
tics
o
f
th
e
io
n
s
o
u
r
ce
p
o
wer
,
m
eth
o
d
s
ca
n
b
e
f
o
r
m
u
lated
to
in
cr
ea
s
e
th
e
q
u
a
n
tity
an
d
q
u
ality
o
f
th
e
io
n
s
o
u
r
ce
o
u
t
p
u
t.
2.
ME
T
H
O
D
2
.
1
.
E
x
perim
ent
a
l
dev
ice
2
.
1
.
1
.
P
ennin
g
t
y
pe
io
n so
urce
As
a
d
ev
ice
th
at
b
ec
o
m
es
th
e
o
b
ject
in
th
is
s
tu
d
y
is
a
p
en
n
i
n
g
ty
p
e
io
n
s
o
u
r
ce
is
u
s
ed
in
t
h
e
DE
C
Y
-
13
c
y
clo
tr
o
n
.
T
h
e
io
n
izatio
n
p
r
o
ce
s
s
in
io
n
s
o
u
r
ce
s
g
en
e
r
ally
o
cc
u
r
s
d
u
e
to
attr
ac
tio
n
b
y
a
h
ig
h
elec
tr
ic
f
ield
d
is
ch
ar
g
e
o
r
d
u
e
to
co
llis
io
n
s
b
y
elec
tr
o
n
s
th
at
h
av
e
k
in
etic
e
n
er
g
y
th
at
e
x
ce
ed
s
th
e
b
in
d
i
n
g
en
er
g
y
o
f
elec
tr
o
n
s
in
th
e
ato
m
.
I
n
p
en
n
i
n
g
ty
p
e
i
o
n
s
o
u
r
ce
s
w
h
er
e
th
e
io
n
izatio
n
p
r
o
ce
s
s
is
d
u
e
to
elec
tr
o
n
co
lli
s
io
n
s
,
th
e
m
in
im
u
m
en
er
g
y
t
o
r
elea
s
e
th
ese
elec
tr
o
n
s
is
ca
lled
io
n
izatio
n
en
e
r
g
y
.
Fo
r
ato
m
s
o
r
m
o
lec
u
les
in
g
as,
th
e
io
n
izatio
n
en
er
g
y
is
1
3
.
6
eV
f
o
r
H
ato
m
s
[
2
0
]
a
n
d
1
5
.
4
eV
f
o
r
H2
m
o
le
cu
les [
2
1
]
.
T
h
e
m
a
in
d
e
v
ice
o
f
th
e
io
n
s
o
u
r
ce
co
n
s
is
ts
o
f
a
h
ea
d
a
n
d
h
o
l
d
er
,
wh
er
e
th
e
h
ea
d
co
n
tain
s
th
e
io
n
izatio
n
ch
am
b
er
wh
ile
th
e
h
o
ld
er
s
er
v
es
as
a
s
u
p
p
o
r
t
f
o
r
th
e
h
ea
d
as
well
as
a
p
lace
to
attac
h
th
e
co
o
lin
g
wate
r
ch
an
n
el,
c
a
t
h
o
d
e
v
o
l
t
a
g
e
c
h
a
n
n
e
l
,
a
n
d
g
a
s
s
u
p
p
l
y
c
h
a
n
n
e
l
.
T
h
e
s
c
h
e
m
at
i
c
o
f
t
h
e
p
e
n
n
i
n
g
i
o
n
s
o
u
r
c
e
i
s
s
h
o
w
n
i
n
F
i
g
u
r
e
1
.
T
h
is
io
n
s
o
u
r
ce
d
e
v
ice
is
in
s
talled
in
ter
n
ally
i
n
th
e
c
y
clo
tr
o
n
tan
k
,
s
o
e
x
ce
p
t
f
o
r
t
h
e
ca
t
h
o
d
e
v
o
ltag
e
s
o
u
r
ce
,
ca
th
o
d
e
cu
r
r
en
t
m
ete
r
,
an
d
g
as
s
u
p
p
ly
co
m
p
o
n
en
ts
,
all
o
th
er
co
m
p
o
n
en
ts
ar
e
in
th
e
cy
clo
tr
o
n
v
ac
u
u
m
ch
am
b
er
.
Fig
u
r
e
1
.
Sch
em
atic
o
f
p
e
n
n
in
g
ty
p
e
io
n
s
o
u
r
ce
2
.
1
.
2
.
I
o
n so
urce
po
wer
s
up
p
ly
T
h
e
io
n
izatio
n
p
r
o
ce
s
s
th
at
o
cc
u
r
s
in
th
e
p
en
n
in
g
ty
p
e
io
n
s
o
u
r
ce
is
p
lay
ed
b
y
t
h
e
io
n
izi
n
g
cu
r
r
en
t
af
ter
th
e
ac
h
iev
em
en
t
o
f
a
h
ig
h
v
o
ltag
e
b
etwe
en
th
e
ca
th
o
d
e
an
d
an
o
d
e
th
at
allo
ws
th
e
d
is
ch
ar
g
e
o
f
elec
tr
o
n
s
f
r
o
m
th
e
ca
th
o
d
e.
T
h
e
h
ig
h
v
o
ltag
e
r
an
g
es
f
r
o
m
1
7
0
0
-
1
8
0
0
V,
wh
ich
is
a
v
o
ltag
e
v
al
u
e
at
wh
ic
h
p
lasma
d
is
ch
ar
g
e
u
s
u
ally
o
cc
u
r
s
f
o
r
tan
talu
m
ca
th
o
d
es
[
2
2
]
-
[
2
4
]
.
So
,
th
e
lar
g
est
io
n
izin
g
cu
r
r
e
n
t
co
m
es
f
r
o
m
th
e
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
6
9
4
I
n
t J Po
w
E
lec
&
Dr
i Sy
s
t
,
Vo
l.
16
,
No
.
4
,
Dec
em
b
er
20
25
:
2562
-
25
69
2564
cu
r
r
en
t
o
f
elec
tr
o
n
s
escap
in
g
f
r
o
m
t
h
e
ca
th
o
d
e
o
r
ca
lled
ca
th
o
d
e
c
u
r
r
en
t.
T
h
e
s
p
ec
if
icat
io
n
s
o
f
t
h
e
p
o
wer
s
u
p
p
ly
ar
e
ca
p
a
b
le
o
f
p
r
o
d
u
ci
n
g
a
h
ig
h
v
o
ltag
e
at
th
e
ca
t
h
o
d
e
o
f
at
least
1
7
0
0
V
a
n
d
a
ca
th
o
d
e
cu
r
r
en
t
th
at
is
g
en
er
ally
i
n
th
e
h
u
n
d
r
e
d
s
o
f
m
A
to
2
A.
I
n
th
is
ca
s
e,
t
h
e
ca
th
o
d
e
c
u
r
r
en
t
is
th
e
v
alu
e
t
h
at
is
co
n
tr
o
lled
o
r
r
eg
u
lated
wh
ile
th
e
c
ath
o
d
e
v
o
ltag
e
is
th
e
v
alu
e
r
esu
ltin
g
f
r
o
m
th
e
ca
th
o
d
e
cu
r
r
en
t settin
g
.
A
p
o
wer
s
u
p
p
ly
to
s
u
p
p
l
y
th
e
ca
th
o
d
e
c
u
r
r
en
t
u
s
ed
in
th
is
e
x
p
er
im
en
t
is
th
e
Sh
ek
o
n
ic
m
o
d
el
W
W
L
-
L
DG
lin
ea
r
h
ig
h
v
o
ltag
e
C
V
C
C
D
C
p
o
wer
s
u
p
p
ly
.
T
h
e
p
o
wer
s
u
p
p
ly
h
as
a
m
ax
im
u
m
ca
p
ac
ity
o
f
3
k
V
2
.
5
A.
B
ec
au
s
e
f
o
r
th
is
io
n
s
o
u
r
ce
ex
p
er
im
en
t
a
cu
r
r
e
n
t
co
n
tr
o
l
is
n
ee
d
ed
,
wh
ich
m
ea
n
s
ch
an
g
in
g
th
e
C
V
m
o
d
e
to
C
C
m
o
d
e
b
y
r
ed
u
cin
g
th
e
l
o
ad
r
esi
s
tan
ce
(
R
lo
ad
)
in
th
is
ca
s
e
th
e
r
esis
tan
ce
in
th
e
io
n
s
o
u
r
ce
p
lasma
ch
am
b
er
,
th
is
is
in
ac
co
r
d
an
ce
with
th
e
b
asi
c
p
r
in
cip
le
o
f
C
C
m
o
d
e
is
R
l
o
ad
<
(
Vo
u
t/Io
u
t)
.
T
h
ese
co
n
d
itio
n
s
ar
e
ac
h
iev
ed
b
y
cr
ea
tin
g
a
h
ig
h
io
n
izin
g
cu
r
r
en
t
in
th
e
io
n
s
o
u
r
ce
p
lasma
wh
ich
ca
n
o
cc
u
r
in
s
tr
o
n
g
io
n
izatio
n
in
th
e
io
n
s
o
u
r
ce
,
an
d
b
ased
o
n
ex
p
er
im
en
tal
ex
p
er
ie
n
ce
it
o
cc
u
r
s
af
te
r
th
e
ca
th
o
d
e
v
o
ltag
e
(
Vo
u
t
)
i
s
ab
o
v
e
1
7
0
0
V.
I
n
o
r
d
er
to
ac
h
ie
v
e
th
at
v
o
ltag
e,
a
r
esis
to
r
o
f
1
k
o
h
m
is
ad
d
ed
to
th
e
p
o
wer
s
u
p
p
ly
o
u
tp
u
t.
T
h
e
s
ch
em
atic
o
f
th
e
p
o
wer
s
u
p
p
l
y
is
s
h
o
wn
in
F
ig
u
r
e
2
.
Fig
u
r
e
2
s
h
o
ws
a
p
o
wer
s
u
p
p
ly
s
y
s
tem
u
s
ed
to
s
u
p
p
ly
v
o
lt
ag
e
an
d
cu
r
r
en
t
to
th
e
io
n
s
o
u
r
ce
.
T
h
is
cir
cu
it
co
n
s
is
ts
o
f
s
ev
er
al
m
ai
n
b
lo
c
k
s
,
s
tar
tin
g
f
r
o
m
a
tr
an
s
f
o
r
m
er
to
ad
ju
s
t
th
e
r
eq
u
ir
e
d
v
o
ltag
e,
a
r
ec
tifie
r
cir
cu
it
co
n
s
is
tin
g
o
f
a
b
r
id
g
e
d
io
d
e
t
o
c
o
n
v
e
r
t
AC
v
o
ltag
e
t
o
DC
v
o
ltag
e
u
p
to
a
m
ax
im
u
m
v
alu
e
o
f
3
k
V.
Af
ter
g
o
in
g
th
r
o
u
g
h
th
e
r
ec
tific
atio
n
p
r
o
ce
s
s
,
th
is
DC
v
o
ltag
e
is
th
en
f
ilter
ed
u
s
in
g
a
co
m
b
in
atio
n
o
f
ca
p
ac
ito
r
s
an
d
r
esis
to
r
s
to
m
ak
e
it m
o
r
e
s
tab
l
e
an
d
r
e
d
u
ce
v
o
ltag
e
r
ip
p
le.
Fu
r
th
er
m
o
r
e
,
th
is
s
y
s
tem
is
co
n
tr
o
lled
b
y
a
c
o
n
tr
o
ller
wh
ich
co
n
s
is
ts
o
f
a
co
m
p
ar
ato
r
cir
cu
it,
s
witch
,
an
d
f
ee
d
b
ac
k
m
ec
h
an
is
m
.
T
h
e
co
m
p
ar
at
o
r
co
m
p
ar
es
th
e
f
e
ed
b
ac
k
v
o
ltag
e
(
Vf
b
)
with
t
h
e
r
ef
er
en
ce
v
o
ltag
e
(
Vr
ef
)
to
en
s
u
r
e
th
at
t
h
e
v
o
ltag
e
o
r
cu
r
r
en
t
p
r
o
v
id
ed
is
in
ac
c
o
r
d
an
ce
with
r
e
q
u
ir
em
e
n
ts
.
T
h
e
s
witch
in
th
e
co
n
tr
o
ller
allo
ws
th
e
s
y
s
tem
to
wo
r
k
in
two
m
o
d
es,
n
am
ely
C
V
m
o
d
e
an
d
C
C
m
o
d
e.
C
V
v
o
l
tag
e
m
o
d
e
is
ac
tiv
e
wh
en
th
e
o
u
tp
u
t
v
o
ltag
e
is
s
tab
le
an
d
th
e
c
u
r
r
en
t
will
f
o
llo
w
th
e
v
o
ltag
e,
wh
ile
cu
r
r
e
n
t
m
o
d
e
o
r
C
C
is
u
s
e
d
if
cu
r
r
en
t stab
ilit
y
h
as b
ee
n
m
et
an
d
th
e
v
o
ltag
e
will a
d
ju
s
t th
e
lo
ad
.
I
n
ad
d
itio
n
,
th
er
e
is
a
s
h
u
n
t
r
e
s
is
to
r
(
R
shunt
)
wh
ich
o
n
e
o
f
its
f
u
n
ctio
n
s
is
u
s
ed
to
m
ea
s
u
r
e
t
h
e
cu
r
r
e
n
t
f
lo
win
g
to
th
e
lo
ad
,
wh
er
e
th
e
v
o
ltag
e
p
r
o
d
u
ce
d
b
y
th
is
r
esis
to
r
is
u
s
ed
as
f
ee
d
b
ac
k
in
cu
r
r
en
t
co
n
tr
o
l.
At
th
e
en
d
o
f
t
h
e
s
y
s
tem
,
t
h
er
e
is
a
R
plasma
co
m
p
o
n
en
t
t
h
at
r
e
p
r
esen
t
s
th
e
p
lasma
r
esis
tan
ce
in
th
e
i
o
n
s
o
u
r
ce
o
r
l
o
ad
,
an
d
a
1
k
Ω
r
esis
to
r
u
s
ed
as
a
cu
r
r
en
t
lim
iter
an
d
as
a
s
af
ety
.
T
h
e
en
tire
s
y
s
tem
aim
s
to
p
r
o
v
id
e
s
tab
le
an
d
co
n
tr
o
lled
p
o
wer
to
th
e
io
n
s
o
u
r
ce
,
wh
ic
h
is
u
s
ed
in
t
h
e
ap
p
l
icatio
n
o
f
th
e
i
o
n
izatio
n
p
r
o
ce
s
s
in
th
e
io
n
s
o
u
r
c
e.
Fig
u
r
e
2
.
T
h
e
C
C
p
o
wer
s
u
p
p
l
y
s
ch
em
atic
f
o
r
i
o
n
s
o
u
r
ce
2
.
2
.
E
x
perim
ent
s
et
up
T
h
e
s
ch
em
atic
o
f
th
e
ex
p
er
i
m
en
tal
s
etu
p
is
illu
s
tr
ated
in
Fig
u
r
e
3
.
T
h
e
r
eg
u
lated
in
p
u
t q
u
a
n
tity
is
th
e
g
as
f
lo
w
r
ate,
wh
ich
is
m
o
n
ito
r
ed
u
s
in
g
a
g
as
f
lo
w
m
eter
.
T
h
e
ac
tu
al
o
u
tp
u
t
q
u
a
n
tity
is
th
e
io
n
izatio
n
d
e
n
s
ity
o
f
th
e
p
lasma
f
o
r
m
atio
n
;
h
o
w
ev
er
,
s
in
ce
th
is
m
ea
s
u
r
e
m
en
t
is
ch
allen
g
in
g
to
o
b
tain
,
w
e
r
ep
r
esen
t
it
with
th
e
io
n
izin
g
p
o
wer
.
T
wo
q
u
a
n
titi
es
th
at
co
r
r
esp
o
n
d
to
th
e
io
n
izin
g
p
o
wer
ar
e
th
e
ca
th
o
d
e
v
o
ltag
e,
m
ea
s
u
r
ed
b
y
th
e
ca
th
o
d
e
v
o
ltag
e
m
eter
,
a
n
d
th
e
ca
th
o
d
e
cu
r
r
en
t,
m
ea
s
u
r
ed
b
y
th
e
ca
th
o
d
e
c
u
r
r
en
t
m
eter
.
T
h
e
io
n
izin
g
p
o
wer
o
f
th
e
io
n
s
o
u
r
c
e
p
lasma
is
ca
lcu
lated
b
y
m
u
ltip
ly
in
g
t
h
e
v
o
ltag
e
an
d
th
e
ca
t
h
o
d
e
c
u
r
r
e
n
t.
T
h
is
ex
p
er
im
en
t
r
eq
u
ir
es th
e
f
o
llo
win
g
co
n
d
itio
n
s
:
i)
T
h
e
v
ac
u
u
m
o
f
th
e
cy
cl
o
tr
o
n
t
an
k
is
g
r
ea
ter
th
a
n
3
×
10
-
6
T
o
r
r
ii)
T
h
e
m
a
g
n
et
is
s
et
at
a
g
en
er
ati
o
n
c
u
r
r
en
t
o
f
2
8
0
,
0
0
0
p
p
m
wh
ich
is
eq
u
i
v
alen
t
to
a
m
ag
n
etic
f
ield
o
f
1
.
2
5
T
at
th
e
ce
n
ter
p
o
in
t o
f
th
e
c
y
c
lo
tr
o
n
wh
er
e
th
e
io
n
s
o
u
r
ce
h
e
ad
is
lo
ca
ted
.
iii)
T
h
e
h
y
d
r
o
g
en
g
as f
lo
w
r
ate
ca
n
b
e
f
lo
wed
u
p
to
8
s
cc
m
a
n
d
i
t is o
b
s
er
v
ed
t
h
at
th
e
v
ac
u
u
m
ch
an
g
es to
n
o
less
th
an
3
×
10
-
5
T
o
r
r
Evaluation Warning : The document was created with Spire.PDF for Python.
I
n
t J Po
w
E
lec
&
Dr
i Sy
s
t
I
SS
N:
2088
-
8
6
9
4
E
ffect
o
f g
a
s
flo
w
r
a
te
o
n
io
n
iz
in
g
p
o
w
er c
h
a
r
a
cteris
tics
o
f p
en
n
in
g
ty
p
e
io
n
s
o
u
r
ce
(
S
ila
kh
u
d
d
in
)
2565
iv
)
T
h
e
io
n
s
o
u
r
ce
p
o
wer
s
o
u
r
ce
ca
n
o
p
er
ate
u
p
t
o
a
m
in
im
u
m
ca
th
o
d
e
v
o
ltag
e
o
f
2
k
V
an
d
ca
n
o
p
er
ate
i
n
co
n
tr
o
l c
u
r
r
en
t m
o
d
e.
A
f
t
e
r
a
c
h
i
e
v
i
n
g
o
p
e
r
a
t
i
o
n
i
n
c
o
n
t
r
o
l
c
u
r
r
e
n
t
m
o
d
e
a
t
c
a
t
h
o
d
e
c
u
r
r
e
n
t
v
a
l
u
e
s
u
p
t
o
h
u
n
d
r
e
d
s
o
f
m
A
,
o
b
s
e
r
v
a
t
i
o
n
s
w
e
r
e
m
a
d
e
o
n
t
h
e
e
f
f
e
c
t
o
f
g
a
s
f
l
o
w
r
a
t
e
o
n
e
l
e
c
t
r
i
c
a
l
p
o
w
e
r
c
h
a
r
a
c
t
e
r
i
s
t
i
c
s
i
n
t
w
o
c
o
n
d
i
t
i
o
n
s
,
n
a
m
e
l
y
:
i)
Ob
s
er
v
atio
n
o
f
th
e
ef
f
ec
t
o
f
v
a
r
iatio
n
s
in
g
as
f
lo
w
r
ate
o
n
th
e
p
o
wer
ch
ar
ac
ter
is
tics
o
f
th
e
io
n
s
o
u
r
ce
,
n
am
ely
th
e
m
u
ltip
licatio
n
o
f
c
u
r
r
en
t
with
ca
th
o
d
e
v
o
ltag
e
.
T
h
e
v
al
u
e
o
f
g
as
f
lo
w
r
ate
v
ar
iatio
n
i
s
b
etwe
en
3
to
8
s
cc
m
an
d
ea
ch
g
as f
lo
w
r
ate
v
alu
e
is
o
b
s
er
v
ed
f
o
r
v
ar
io
u
s
ca
th
o
d
e
cu
r
r
en
t
v
alu
es b
etwe
en
0
.
1
A
to
1
A.
ii)
A
cr
o
s
s
-
o
v
er
test
was
th
en
p
er
f
o
r
m
ed
b
y
o
b
s
er
v
in
g
th
e
ch
a
r
ac
ter
is
tics
o
f
th
e
ch
an
g
e
in
ca
th
o
d
e
v
o
ltag
e
o
v
er
th
e
g
as
f
lo
w
r
ate
v
ar
iatio
n
s
b
etwe
en
3
to
8
s
cc
m
f
o
r
a
s
p
ec
if
ic
ca
th
o
d
e
cu
r
r
e
n
t
v
alu
e
to
b
e
s
elec
ted
.
Ob
s
er
v
atio
n
s
o
f
ch
a
n
g
es
in
ca
t
h
o
d
e
cu
r
r
en
t
wer
e
n
o
t
m
ad
e
b
e
ca
u
s
e
th
e
o
p
er
atin
g
m
o
d
e
was
co
n
tr
o
l
cu
r
r
en
t.
Fig
u
r
e
3
.
E
x
p
er
im
e
n
tal
s
etu
p
s
ch
em
e
2
.
3
.
Ana
ly
s
is
pro
ce
du
re
T
h
e
a
n
a
l
y
s
is
w
i
ll
f
o
c
u
s
o
n
t
h
e
e
f
f
e
c
t
s
o
f
v
a
r
i
a
t
i
o
n
s
i
n
g
a
s
f
l
o
w
r
a
t
e
o
n
t
h
e
p
o
w
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r
c
h
a
r
a
c
t
e
r
i
s
t
i
cs
o
f
t
h
e
i
o
n
s
o
u
r
c
e
.
W
e
w
il
l
e
x
a
m
i
n
e
h
o
w
t
h
e
s
e
c
h
a
r
a
ct
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r
is
t
i
cs
a
p
p
e
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r
an
d
e
x
p
l
o
r
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t
h
e
i
r
t
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e
o
r
e
t
i
c
a
l
u
n
d
e
r
s
t
a
n
d
i
n
g
.
F
i
n
al
l
y
,
w
e
w
i
ll
s
t
u
d
y
h
o
w
t
h
e
s
e
c
h
a
r
a
ct
e
r
i
s
t
i
cs
i
m
p
a
c
t
t
h
e
r
a
t
e
o
f
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o
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iz
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t
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o
n
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y
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e
r
a
t
e
d
b
y
t
h
e
i
o
n
s
o
u
r
c
e
.
3.
RE
SU
L
T
S AN
D
D
I
SCU
SS
I
O
N
3
.
1
.
Cha
ra
c
t
er
is
t
ics o
f
io
nizin
g
po
wer
T
h
e
r
esu
lts
o
f
th
e
e
x
p
er
im
e
n
ts
co
n
d
u
cte
d
h
a
v
e
o
b
s
er
v
ed
th
e
r
elatio
n
s
h
ip
b
etwe
en
th
e
g
a
s
f
lo
w
r
ate
an
d
th
e
p
o
wer
c
h
ar
ac
ter
is
tics
o
f
th
e
io
n
s
o
u
r
ce
as
s
h
o
wn
in
Fig
u
r
e
4
.
Fro
m
th
e
cu
r
v
es
in
Fig
u
r
e
4
,
it
ap
p
ea
r
s
th
at
th
e
g
as f
lo
w
r
ate
d
o
es n
o
t
h
av
e
a
n
o
ticea
b
le
ef
f
ec
t
o
n
th
e
io
n
izin
g
p
o
we
r
.
Fu
r
t
h
er
m
o
r
e,
it will b
e
ex
p
lo
r
ed
wh
y
th
is
ca
n
h
ap
p
e
n
,
s
o
as c
r
o
s
s
-
ex
am
in
atio
n
d
ata,
th
e
r
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lt
s
o
f
th
e
ca
th
o
d
e
v
o
ltag
e
ch
ar
a
cter
is
tics
o
f
th
e
g
as
f
lo
w
r
ate
v
ar
iatio
n
f
r
o
m
3
to
8
s
cc
m
ar
e
p
r
esen
ted
i
n
Fig
u
r
e
5
.
Fig
u
r
e
4
.
E
f
f
ec
t o
f
g
as f
lo
w
r
a
te
v
ar
iatio
n
o
n
ca
th
o
d
e
p
o
wer
Fig
u
r
e
5
.
E
f
f
ec
t o
f
g
as f
lo
w
r
a
te
o
n
ca
th
o
d
e
v
o
ltag
e
Evaluation Warning : The document was created with Spire.PDF for Python.
I
SS
N
:
2
0
8
8
-
8
6
9
4
I
n
t J Po
w
E
lec
&
Dr
i Sy
s
t
,
Vo
l.
16
,
No
.
4
,
Dec
em
b
er
20
25
:
2562
-
25
69
2566
Fro
m
Fig
u
r
e
5
,
it
ca
n
b
e
s
ee
n
th
at
th
er
e
is
alm
o
s
t
n
o
ch
an
g
e
in
th
e
v
o
ltag
e
v
alu
e
wh
en
th
e
g
as
f
lo
w
r
ate
is
v
ar
ied
.
T
h
is
m
ea
n
s
th
at
th
e
ab
s
en
ce
o
f
th
e
ef
f
ec
t
o
f
g
a
s
f
lo
w
r
ate
v
a
r
iatio
n
o
n
io
n
izin
g
p
o
wer
,
as sh
o
w
n
in
Fig
u
r
e
4
,
is
d
u
e
t
o
th
e
ab
s
e
n
ce
o
f
its
ef
f
ec
t
o
n
t
h
e
ca
th
o
d
e
v
o
ltag
e.
Ho
wev
er
,
s
in
ce
th
e
p
er
f
o
r
m
an
ce
o
f
t
h
e
io
n
s
o
u
r
ce
is
b
asically
m
ea
s
u
r
ed
b
ased
o
n
t
h
e
o
u
tp
u
t
in
g
en
er
atin
g
th
e
io
n
b
ea
m
,
t
h
e
ef
f
ec
ts
o
f
t
h
ese
ch
ar
ac
ter
is
tics
o
n
th
e
io
n
izatio
n
in
ten
s
ity
r
ate
will b
e
an
aly
ze
d
as d
escr
ib
ed
b
el
o
w.
3
.
2
.
I
m
pli
ca
t
i
o
ns
f
o
r
io
niza
t
i
o
n inte
ns
it
y
ra
t
e
T
o
s
tu
d
y
th
e
im
p
licatio
n
s
f
o
r
io
n
izatio
n
i
n
ten
s
ity
,
th
e
f
o
l
lo
win
g
an
aly
s
is
is
u
s
ed
.
I
n
a
p
en
n
in
g
io
n
izatio
n
g
au
g
e
(
PIG
)
io
n
s
o
u
r
ce
,
wh
e
r
e
io
n
izatio
n
is
f
o
r
m
ed
d
u
e
to
elec
tr
o
n
co
llis
io
n
s
,
t
h
e
n
u
m
b
er
o
f
ato
m
s
o
r
m
o
l
ec
u
les
io
n
ized
d
ep
e
n
d
s
o
n
th
e
p
ar
am
ete
r
s
:
i)
E
lectr
o
n
cu
r
r
en
t
d
en
s
ity
(
am
p
er
es
p
e
r
m
2
)
,
I
e
;
ii)
E
f
f
ec
tiv
e
v
o
lu
m
e
o
f
io
n
izatio
n
,
ʋ
;
iii)
Nu
m
b
er
o
f
m
o
les
o
f
g
as
p
er
u
n
it
v
o
l
u
m
e
o
f
i
o
n
izatio
n
ch
am
b
er
,
n
a
;
an
d
iv
)
I
o
n
izatio
n
cr
o
s
s
s
ec
tio
n
,
σ
i
.
T
h
e
io
n
f
o
r
m
ati
o
n
r
ate
I
i
i
n
th
e
io
n
izatio
n
ch
a
m
b
er
[
2
5
]
.
I
i
= J
e
v
n
a
σ
i
(
1
)
F
o
r
p
en
n
in
g
io
n
s
o
u
r
ce
s
,
J
e
ca
n
b
e
tak
en
f
r
o
m
t
h
e
d
is
ch
ar
g
e
cu
r
r
en
t d
e
n
s
ity
b
etwe
en
th
e
ca
th
o
d
e
an
d
an
o
d
e
o
r
th
e
s
o
-
ca
lled
ca
th
o
d
e
c
u
r
r
en
t.
is
th
e
p
ar
t
o
f
th
e
v
o
lu
m
e
in
wh
ich
th
e
g
as
ato
m
s
ar
e
i
o
n
ized
,
wh
ich
is
n
o
t
n
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ess
ar
ily
eq
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al
to
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e
v
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l
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m
e
o
f
th
e
io
n
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n
ch
am
b
e
r
.
T
h
e
io
n
iz
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n
ch
am
b
e
r
r
e
f
er
r
ed
to
h
er
e
is
th
e
s
p
ac
e
o
f
th
e
an
o
d
e
ca
v
ity
.
Ass
u
m
in
g
th
e
h
y
d
r
o
g
en
g
as
in
th
e
io
n
iz
atio
n
ch
am
b
er
is
a
n
id
ea
l
g
as,
th
e
v
alu
e
o
f
n
a
ca
n
b
e
ca
lcu
lated
f
r
o
m
(
2
)
.
=
(
2
)
W
h
er
e
p
is
th
e
g
as p
r
ess
u
r
e,
k
th
e
B
o
ltzm
an
n
co
n
s
tan
t =
1
.
3
8
×
10
-
23
J
/K
an
d
T
th
e
p
lasma
te
m
p
er
atu
r
e
i
n
o
K.
B
y
co
m
b
in
in
g
th
e
cu
r
v
e
in
Fig
u
r
e
5
wh
er
e
th
er
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is
alm
o
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ch
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i
n
ca
th
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v
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V
w
h
ich
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n
s
th
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e
is
n
o
c
h
an
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in
io
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cr
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v
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σ
i
,
b
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a
u
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σ
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d
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en
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s
o
n
V
,
with
(
1
)
,
it
ca
n
b
e
tem
p
o
r
ar
ily
s
aid
th
at
th
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v
ar
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n
o
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th
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w
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o
t
af
f
ec
t th
e
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in
ten
s
ity
.
B
ased
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n
(
2
)
,
th
e
v
alu
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o
f
ato
m
s
/m
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p
er
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n
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s
p
ac
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n
a
in
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wh
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p
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T
h
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r
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lt
s
in
th
e
r
ate
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f
io
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m
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in
th
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ch
am
b
er
r
is
in
g
,
b
ased
o
n
(
1
)
,
r
esu
ltin
g
in
th
e
elec
tr
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co
n
d
u
ctiv
ity
v
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o
f
th
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p
lasma
r
is
in
g
.
B
ec
au
s
e
th
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elec
tr
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c
cu
r
r
en
t
is
m
ad
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co
n
s
tan
t,
th
e
in
cr
ea
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in
co
n
d
u
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h
as th
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ec
t o
f
d
ec
r
ea
s
in
g
th
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v
o
lt
ag
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b
etwe
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th
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t
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n
d
a
n
o
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e.
T
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p
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d
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is
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s
s
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f
o
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I
o
n
p
r
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d
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s
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th
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v
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o
f
th
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n
f
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r
m
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r
ate
I
i
.
I
n
(
1
)
th
e
v
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e
o
f
I
i
is
in
f
lu
en
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d
b
y
th
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v
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v
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tr
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d
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s
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J
e
p
lay
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d
b
y
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e
ca
th
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d
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t
h
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m
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a
,
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cr
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s
s
s
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σ
i
.
I
n
th
is
ca
s
e
th
e
v
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o
f
σ
i
is
co
n
s
id
er
ed
to
b
e
a
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m
all
c
h
a
n
g
e
in
th
e
r
a
n
g
e
o
f
ch
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th
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c
ath
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v
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e
V
k
(
p
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tio
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f
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p
ac
to
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elec
tr
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)
th
a
t
o
cc
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r
r
e
d
in
th
is
ex
p
er
im
e
n
t
w
h
ich
is
o
n
ly
in
th
e
r
an
g
e
o
f
6
4
0
to
6
7
0
V
[
2
6
]
,
[
2
7
]
.
Sin
c
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th
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v
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o
f
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th
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ex
p
er
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is
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n
s
tan
t,
it
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s
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n
ly
th
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n
a
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at
will
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u
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tity
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at
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s
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d
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lu
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latter
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ch
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th
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u
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p
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e
f
o
llo
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is
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s
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io
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.
T
h
e
s
im
u
latio
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s
in
g
th
e
C
FD
p
r
o
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r
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m
p
r
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ata
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h
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ip
b
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e
h
y
d
r
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g
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g
as
f
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d
t
h
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p
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r
e
in
t
h
e
io
n
izatio
n
ch
am
b
er
o
f
th
e
i
o
n
s
o
u
r
ce
.
T
h
e
p
a
r
am
eter
s
in
th
e
s
im
u
latio
n
wer
e
th
e
s
am
e
as
th
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p
ar
am
eter
s
in
th
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d
is
cu
s
s
ed
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s
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er
e.
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r
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g
to
th
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im
u
latio
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ata
th
at
h
as
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ee
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ca
r
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ied
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t b
y
t
h
e
au
th
o
r
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th
e
p
r
o
ce
s
s
in
g
o
f
t
h
e
s
im
u
latio
n
r
esu
lts
is
p
r
esen
ted
in
T
ab
le
1
.
T
ab
le
1
.
R
elatio
n
s
h
ip
b
etwe
en
g
as f
lo
w
r
ate
an
d
p
r
ess
u
r
e
in
th
e
io
n
i
za
tio
n
c
h
am
b
e
r
No
G
a
s fl
o
w
r
a
t
e
(
sc
c
m)
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a
s p
r
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ssu
r
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×
10
-
5
(
T
o
r
r
)
No
G
a
s fl
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(
sc
c
m)
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×
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5
(
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o
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r
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1.
3
5
.
1
7
4.
6
8
.
7
3
2.
4
6
.
1
4
5.
7
1
0
.
3
9
3.
5
7
.
2
5
6.
8
1
2
.
3
2
F
r
o
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th
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ata
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it
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b
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ee
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h
at
in
cr
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ig
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ican
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in
g
as
p
r
ess
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in
th
e
io
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ch
am
b
er
.
R
ef
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r
in
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to
(
2
)
,
th
e
in
cr
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s
e
in
g
a
s
p
r
ess
u
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e
will
lin
ea
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ly
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ea
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th
e
v
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n
u
m
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o
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er
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it
v
o
lu
m
e
,
n
a
an
d
u
ltima
tely
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b
a
s
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o
n
(
1
)
will
also
in
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t
h
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v
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f
th
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io
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m
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ate
I
i
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th
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io
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if
ican
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B
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ar
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th
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p
atter
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o
f
g
as
p
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in
cr
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s
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it
is
q
u
an
titativ
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p
r
e
d
icted
th
at
in
cr
ea
s
in
g
g
as
f
r
o
m
3
s
cc
m
t
o
5
s
cc
m
will
in
cr
ea
s
e
th
e
io
n
f
o
r
m
atio
n
r
ate
b
y
1
.
4
tim
es
an
d
to
2
.
4
tim
es
f
o
r
an
in
cr
ea
s
e
to
8
s
cc
m
.
So
,
th
e
in
cr
ea
s
e
in
g
as
f
lo
w
r
ate
p
lay
s
an
im
p
o
r
tan
t
r
o
le
in
Evaluation Warning : The document was created with Spire.PDF for Python.
I
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N:
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8
6
9
4
E
ffect
o
f g
a
s
flo
w
r
a
te
o
n
io
n
iz
in
g
p
o
w
er c
h
a
r
a
cteris
tics
o
f p
en
n
in
g
ty
p
e
io
n
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o
u
r
ce
(
S
ila
kh
u
d
d
in
)
2567
in
cr
ea
s
in
g
io
n
p
r
o
d
u
ctiv
ity
.
O
f
co
u
r
s
e,
th
er
e
is
a
c
er
tain
lim
i
t
v
alu
e
o
f
th
e
p
e
r
m
itted
g
as
f
l
o
w
r
ate
s
o
as
n
o
t
to
h
av
e
a
d
etr
im
en
tal
ef
f
ec
t
o
n
r
e
d
u
cin
g
t
h
e
v
ac
u
u
m
i
n
th
e
c
y
cl
o
tr
o
n
ac
ce
le
r
ato
r
c
h
am
b
er
.
T
h
e
o
p
er
atin
g
v
ac
u
u
m
lev
el
o
f
a
c
y
clo
tr
o
n
is
in
th
e
r
an
g
e
o
f
s
ev
e
r
al
1
0
-
6
T
o
r
r
,
wh
ich
ca
n
b
e
ex
p
er
im
en
tall
y
d
eter
m
in
ed
as
th
e
m
ax
im
u
m
v
alu
e
o
f
th
e
g
as f
lo
w
r
ate.
3
.
3
.
I
nv
ent
io
n
re
s
ults
B
ased
o
n
th
e
r
esu
lts
ar
e
p
r
ese
n
ted
ab
o
v
e
,
two
k
ey
f
in
d
in
g
s
f
r
o
m
th
is
r
esear
ch
ca
n
b
e
s
u
m
m
ar
ized
as
f
o
llo
ws:
i)
C
h
an
g
es
in
th
e
g
as
f
lo
w
r
ate,
r
an
g
in
g
f
r
o
m
3
s
cc
m
to
8
s
cc
m
,
d
o
n
o
t
af
f
ec
t
th
e
ch
ar
ac
ter
is
tics
o
f
io
n
izatio
n
p
o
wer
;
an
d
ii)
Alth
o
u
g
h
th
e
ch
ar
ac
ter
is
tics
o
f
io
n
izatio
n
p
o
wer
r
e
m
ain
u
n
c
h
an
g
ed
,
th
eo
r
etica
l
an
aly
s
is
in
d
icate
s
a
s
ig
n
if
ican
t
in
cr
ea
s
e
in
io
n
izatio
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in
ten
s
ity
d
u
e
to
th
e
h
ig
h
er
g
as
f
lo
w
r
ate.
T
h
e
r
ate
o
f
io
n
izatio
n
in
ten
s
ity
d
u
e
to
th
e
in
cr
ea
s
e
in
g
as f
lo
w
r
ate.
4.
CO
NCL
U
SI
O
N
T
h
e
ef
f
ec
t
o
f
v
ar
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n
in
th
e
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a
te
o
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h
y
d
r
o
g
e
n
g
as
i
n
jecte
d
in
t
o
th
e
i
o
n
izatio
n
ch
am
b
e
r
d
o
es
n
o
t
ap
p
ea
r
to
h
av
e
an
y
s
ig
n
if
ican
t
ch
an
g
es
in
th
e
io
n
izin
g
p
o
wer
v
alu
e.
Ho
wev
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,
th
er
e
is
a
ten
d
e
n
cy
to
d
ec
r
ea
s
e
th
e
v
o
ltag
e
with
an
in
c
r
ea
s
e
in
th
e
g
as
in
jectio
n
r
ate
b
ased
o
n
t
h
e
th
eo
r
etica
l
an
aly
s
is
o
f
th
e
t
h
eo
r
etica
l
f
o
r
m
u
la
d
u
e
to
th
e
c
o
n
d
u
ctiv
ity
v
alu
e
th
at
r
is
es.
Sin
ce
th
e
ca
th
o
d
e
cu
r
r
en
t
v
alu
e
is
m
ad
e
co
n
s
tan
t,
th
e
in
cr
ea
s
e
in
co
n
d
u
ctiv
ity
v
al
u
e
ca
u
s
es
a
d
ec
r
ea
s
e
in
th
e
ca
th
o
d
e
v
o
ltag
e
v
alu
e.
Ho
wev
er
,
th
e
d
ec
r
ea
s
e
in
v
o
ltag
e
v
alu
e
d
o
es
n
o
t
s
ig
n
if
ican
tly
af
f
ec
t
th
e
r
ate
o
f
i
o
n
f
o
r
m
atio
n
in
th
e
i
o
n
izat
io
n
ch
am
b
er
.
B
ased
o
n
f
u
r
th
e
r
an
aly
s
is
,
th
e
ef
f
ec
t
o
f
in
cr
ea
s
in
g
th
e
g
as
f
lo
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ate
will
h
av
e
a
s
ig
n
if
ican
t
ef
f
ec
t
o
n
th
e
r
ate
o
f
th
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n
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n
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s
ity
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ate
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e
to
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e
ef
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ec
t o
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ig
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c
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ase
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as p
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f
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in
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m
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